This expansion for a semiconductor manufacturer involved the relocation of 15 manufacturing and research labs (30,000 total square feet) and the design of a new 35,000-square-foot cleanroom in the vacated space. The project included the design and installation of five new makeup air handlers, process exhaust system, process vacuum system, four hydrogen furnaces, an 18,000-cfm RTO and upgrades to the site utility systems.
CDM also designed a major expansion of the site's chemical wastewater treatment system to accommodate 19,000 square feet of additional Class 10,000 cleanroom to support process tool requirements. The wastewater treatment system capacity was expanded from 63,000 gpd to 73,000 gpd. The expansion design included a new enclosed tank farm/pump house, a disc-stack centrifuge, an ion exchange system, and several new holding and treatment tanks and associated pumping and piping systems.
CLIENT: Confidential semiconductor manufacturer
LOCATION: New York