CDM provided architectural and engineering design services for a 1,300-square-foot (sq ft) laboratory renovation at the University at Albany—State University of New York. The project includes a redesign of an existing chemistry building laboratory to accommodate the addition of four semiconductor process tools within a new Class 1,000 cleanroom environment for the School of Nanosciences.
The renovated laboratory houses Emcore MOCVD Tool models D125, D75, and D180 for III-Nitride metallorganic chemical vapor deposition, and an RTP 610 for rapid thermal annealing. Support systems for the new tools required new electrical, mechanical, process, and life safety systems. Ammonia, silane, hydrogen, nitrogen, compressed air, de-ionized water, process cooling water, and process vacuum systems were added or upgraded as a part of the renovation.
The laboratory rework required substantial mechanical system upgrades, including new 2,500 CFM make-up air handlers, necessary to provide a self-contained air make-up and recirculation air handling system separate from the central building system. Modifications were made to both the general laboratory and toxic exhaust systems to accommodate the new gas cabinets and hydrogen generator. A 400-degree high-temperature water-to-steam boiler for humidification and a 50-ton chiller were added to support new systems. In addition, the electrical service was upgraded to include adequate power for the new tools, mechanical systems, and the life-safety monitoring system, which has become the university's standard for all future life safety monitoring systems.